UV Design

Hyperion excels at optical design for both DUV and EUV applications.  We have an extensive knowledge base and understand the requirements from the illuminator all the way to the resist.  Our staff is considered world experts in the design of optical systems for semiconductor process, semiconductor metrology, and semiconductor process applications.

DUV Design

  • High Dry Scanner Lenses
  • Immersion Scanner Lenses
  • Inspection Optics
  • Process Optics

 

EUV Design

  • Projection Systems
  • Illumination Systems
  • Metrology Systems